MEMS悬浮结构TEM样品制备方法

Study of TEM Sample Preparation Methods for MEMS Floating Structure Analysis

MEMS器件具有镂空和悬浮结构。对悬浮结构进行失效分析遇到了新的挑战。对其进行透射电镜(TEM)分析的时候,采用传统的样品制备方法会导致样品的变形甚至断裂。本文介绍了两种新颖实用的制备MEMS悬浮结构TEM样品的方法。方法一是利用玻璃针提取分离的样品,再利用聚焦离子束(FIB)来制备TEM样品;方法二是在FIB机台中原位提取L或C形切断的样品,再用常规的TEM样品制备方法制备样品。

The MEMS structure has hollow areas inside and ＂floating＂ structures. New challenge arises for the analy- sis of floating structures. Traditional TEM sample preparation method usually leads to distortion and dissociation de- fccts of the floating structure. This paper introduces two innovative practical methods of TEM sample preparation for MEMS floating structure analysis. Method 1 used glass needle to lift out the separated film and then use FIB for TEM membrane preparation; method 2 used in situ pick up system to lift out L- or C-shaped cut film, and then the sample can be applied to normal TEM membrane preparation procedure.