日盲探测宽波段低噪声滤波器件的研制

Development of Wide-Band Low-Noise Filter for Solar Blind Detection System

为满足日盲探测系统的技术要求,研制了一种可以实现紫外日盲区(200~270nm)高透射、近紫外到近红外区(300~1200nm)深截止的光学滤光片。通过分析材料的光学特性,结合光学薄膜理论,优化膜系结构,设计了介质与金属组合的膜系。采用电子束加热蒸发的方法沉积金属膜,通过对沉积速率的实验研究,在保证金属光学性能的前提下,有效降低了膜厚控制误差。采用逆向反演法与膜层敏感度分析,对谐振层工艺参数进行优化,有效降低了谐振层的控制误差。该滤光膜在200~270nm波段的平均透射率达到51.21%,在300~1200nm抑制区的平均透射率为0.90%。

In order to meet the technical requirements of the solar blind detection system, a kind of optical filter is developed, which can realize high transmittance in the ultraviolet light field （200-270 nm） and deep cutoff from near ultraviolet to near infrared （300-1200 nm）, By analyzing the optical properties of the material, combining optical film theory and optimizing the film system structure, the film system combined with medium and metal is designed. The metal film is deposited by electron beam heating and evaporation. Through the experiment on the deposition rate, the control error of the film thickness is effectively reduced under the premise of ensuring the optical properties of the metal. By Using the reverse inversion method and the film sensitivity analysis, the process parameters of the resonant layer are optimized, and the control error of the resonant layer is effectively reduced. The average transmittance of the filter film is 51. 21% in the range of 200-270 nm, and the average transmittance in the inhibition region of 300-1200 nm is 0.90%.