浅析晶圆制造自动化物料运输系统调度研究现状

Survey on the Current Situation of Wafer Fabrication Automated Material Handling System Scheduling

自动化物料运输系统(Automatic Material Handling System,AMHS)在晶圆制造中扮演着非常重要的角色,已成为晶圆制造工厂不可或缺的组成部分。晶圆制造AMHS具有运输任务规模庞大、运输需求随机、任务实时性要求高等特点,通过调度优化可显著提高AMHS及晶圆制造系统运行效率。对晶圆制造AMHS调度方法研究现状进行了简单总结,并指出了AMHS调度进一步的研究方向。

Automatic material handling system （AMHS） plays a very important role in wafer fabrication and has become an integral part of the wafer fabrication facility. Wafer fabrication AMHS has a large scale of transport tasks, transportation needs random, high real-time task requirements, through schedule optimization can signifi- cantly improve operational efficiency of AMHS and wafer fabrication system. In this paper, the present situation of AMHS scheduling method for wafer fabrication is briefly summarized, and the further research direction of AMHS scheduling is pointed out.