半导体器件分析仪任意波形发生电路的设计

Design of Arbitrary Wave Generator Circuit for Semiconductor Device Analyzer

半导体器件分析仪是一款10插槽设计的模块化仪器,包含高功率、中功率、电容测量以及波形发生与快速测量模块(WGFMU)等,具有电流对电压测量(IV)、电容对电压测量(CV)、脉冲发生、快速IV测量等功能。WGFMU模块集成了任意波形发生和快速电压电流测量等能力,本文针对WGFMU模块的任意波形发生电路进行详细的设计与分析,并进行了输出波形验证。

Semiconductor device analyzer is a modular instrument with ten slots, which consists ot mociutes oI high power, middle power, capacitance measurement, wave generator and fast measurement, etc. This instrument has the function of the measurement of current to voltage, capacitance to voltage, pulse generator and fast IV. The WGFMU module integrates random wave generator with fast IV measurement. The random wave generator circuit of WGFMU module is designed and analyzed in this paper and the output wave is then validated.