基于ANSYS的3种四杆柔性铰链机构刚度特性分析

Analysis of the Stiffness Characteristic of Three Types of Four-bar Flexure Hinge Mechanism based on ANSYS

单平行四杆柔性铰链机构作为移动副被广泛用于超精密工作台、精密传感器中。超精密工作台依靠其变形产生位移,故刚度特性对其定位精度影响较大。针对3种不同类型的四杆柔性铰链机构,对其刚度进行理论计算,同时,基于有限元软件ANSYS 12.0分析了3种不同类型的四杆柔性铰链机构。通过比较、分析得出了不同的外形尺寸对于四杆柔性铰链机构刚度的影响程度以及3种机构之间的刚度关系,为确定3种机构的适用场合和在MEMS设计过程中柔性铰链的选用提供了依据。

The single parallel four - bar flexure hinge mechanism is widely used as the prismatic pair of the uhra - precision stage and precision sensors. Since the ultra - precision stage produces the displacement de- pended on it, so the stiffness of single parallel four - bar flexure hinge mechanism has a great influence on the positioning accuracy of ultra - precision stage. Aiming at three types of single parallel four - bar flexure hinge mechanisms, the theoretical calculation of stiffness is carried out, then, the mechanisms are analyzed by the fi- nite element software ANSYS 12.0. The influences of different external dimensions on the stiffness and relation- ship between stiffness of three types of mechanisms are obtained through comparison and analysis, a reference for their application occasions and the selection in MEMS design is provided.