基于IGBT的时分N倍频中频溅射电源的研究

The Research on IGBT hour minute N dual frequency middle frequency magnetron sputtering power supply

本文重点叙述时分制N倍频技术在磁控溅射中频电源中的应用,文中讨论了以往中频电源技术发展中的短板与瓶颈,今后采用IGBT时分制N倍频技术可以大幅度提高电源的工作频率、输出功率以及整机的可靠性,不失为一前瞻性技术。本文推出的主电路拓扑及其控制系统可做研发时的基础电路以供读者参考。最后制出一款样机,旨在验证其原理的可行性,其技术性能已达到原设计要求。

In this paper deeply stated the hour minute N dual frequency technology application of in the magnetron sputtering middle frequency power supply. The paper discussed the middle frequency power supply technology was imperfect and neural network at past experience. After we used the IGBT hour minute N dual frequency technology, It may largely rise the power supply working frequency, output power and whole of set reliability. It is a forward direction technology. The paper pushes out the main circuit topology and control system. It＇s only a basic circuit for the reader reference. Finally, we have been offering a shape power supply. The purpose consist in to check reliable of principle, the technology performance already reached original design requirement.