热处理气氛对溶胶--凝胶法Al∶ZnO膜特性的影响

Effects of Annealing Atmospheres on the Characteristic of Al-doped ZnO Films via Sol-gel Method

采用溶胶—凝胶旋涂技术在玻璃衬底上制备Al∶ZnO薄膜(AZO)。在500℃条件下,利用氮气和氢气两种气氛分别对样品进行热处理,并对热处理后的薄膜特性进行研究。结果表明,上述两种气氛下所制薄膜都具有六方纤锌矿结构与C轴择优取向性;扫描探针显微结果表明,氮气气氛下薄膜形貌呈金字塔形,与氢气气氛所制薄膜差异明显;紫外可见光透射光谱图结果表明,氢气气氛下所制薄膜可见光透过率超过60%,高于氮气气氛所制样品,这可能与薄膜表面形貌有关。

In this paper,the Al-doped ZnO films were fabricated on thin glass substrates by the sol-gel spin coating method.After that,the annealing process was carried out at 500 ℃ in N2 and H2 atmospheres,respectively.The effects of annealing atmospheres on the characteristic of the Al-doped ZnO films have been investigated.The results indicated that both of the as-deposited films retained typical hexagonal wurtzite structure and showed preferential c-axis orientation.The 3-D scanning probe microscopy spectra has revealed the pyramide-like grain structure of the films annealed in N2 atmosphere,which is distinct from that annealed in H2 atmosphere.The optical transmittance of the films annealed in H2 atmosphere has reached more than 60%,much higher than that in N2 atmosphere,which is probably controlled by the surface topography.