六氟化硫中的微量氟化物的GC-MS检测方法

Determination of fluorides in sulfur hexafluoride by GC-MS

建立了气相色谱质谱联用法测定六氟化硫中的四氟化碳、六氟乙烷和八氟丙烷的方法。采用选择性离子监测(SIM)模式,分别以m/z 69、m/z 119和m/z 69作为四氟化碳、六氟乙烷和八氟丙烷的定量离子,在0.1~50μmol/mol的浓度线性范围内,待测物体积分数与响应值呈良好的线性关系(R2≥0.999),四氟化碳、六氟乙烷和八氟丙烷的检出限均低于0.01μmol/mol。方法处理简单,检测时间短,具有良好的准确度和精密度,并解决了八氟丙烷响应差的问题。

A method for the determination of tetrafluoromethane （CF4）, hexafuoroethane（C2F6） and octafuoropropane（C3F8） in sulfur hexafuoride （SF6） was proposed by gas chromatography-mass spectrometry （GC-MS） with selection ion monitoring mode（SIM）. The ions m/z=69, m/z=119 and m/z= 69 were chosen as quantitative ion for CF4, C2F6 and C3F8. The results show that the calibration curve has good linearity in liner range of 0.1~50 μmol/mol with the correlation coeffcient higher than 0. 999, and the limits of detection are less than 0.01 μmol/mol.The method is simple, rapid, accurate, and solved the problem of poor response of C3F8.