纳米级光滑石墨表面的拉曼光谱表征

Raman Spectroscopy Characterization of Nanometer Level Flat Graphite Surface

石墨微结构的表面一般为原子级光滑或纳米级光滑,是研究表面、界面物理性质的重要基础,对结构超润滑、微机电器件的研究和应用非常重要。为了解石墨微结构表面的状态和性质,其无损表征具有重要意义。通过微加工方法制备出石墨微结构,使用微纳机械手上的针尖推动石墨微结构上部可以得到原子级光滑或纳米级光滑的石墨表面。使用拉曼光谱对获得的石墨表面进行表征。通过与原子力显微镜和电子显微镜的表征结果进行对比发现,拉曼光谱能够准确反映石墨表面的缺陷程度,同时具有非接触、无损和快速的优点。这表明拉曼光谱在纳米级光滑石墨表面的表征中能够提供可靠表征信息,并且检测快速、不破坏样品,为石墨结构超润滑和MEMS器件的后续研究和应用奠定了基础。

The atomically flat or nanometer level flat surface of graphite microstructure is an important founda-tion for studying the physical properties of the surface and interface and extremely important for the research and application of superlubricity and MEMS devices. In order to understand the state and properties of the sur-face of the graphite microstructure？it is of great significance to characterize non-destructively. The graphite mi-crostructure was prepared by micromachining technology. Atomically flat or nanometer level flat graphite sur-faces can be obtained by shearing the upper part of graphite mesa microstructure with a probe held by a manip-ulator. The surface of the graphite microstructure was characterized by Raman spectroscopy. By comparing with the results of atomic force microscopy, the results show that the Raman spectra can accurately reflect the de-gree of defects on the surface of graphite,and have the advantages of non-contact,non-destructive and fast. This shows that Raman spectroscopy can provide reliable characterization information in the characterization of the atomically flat graphite surface,and it can be used for rapid and nondestructive testing of samples, which lays the foundation for further research and application of graphite superlubricity and MEMS devices.