摘要
针对往复走丝电火花线切割加工硅晶体时,无法准确判别其极间加工状态、伺服进给速度不能实时响应加工状态变化的问题,提出了一种基于放电概率检测的采样方法,设计并搭建了硅晶体电火花线切割加工伺服控制系统。通过工艺验证证明该伺服控制系统能显著提高硅晶体电火花线切割加工的表面质量、效率及形状精度。
To aim at such difficult problems whom the machining status between two electrodes can not be distinguished accurately and the servo feed speed can not real-time respond the changes of the machining status during WEDM silicon crystal,a sampling method based on discharge probability detection is proposed. The servo control system of WEDM silicon crystal is designed and built. And by process test,it is proved that the servo control system enhance significantly the surface qulity,efficiency and shape accuracy of WEDM silicon crystal.
出处
《电加工与模具》
2017年第3期25-30,共6页
Electromachining & Mould
基金
国家自然科学基金资助项目(51575271)
