椰壳活性炭吸附纯化回收H_2的初步研究

Preliminary Study on Purification of Recovery H_2 by Coconut Activated Carbons Adsorption

测定了椰壳活性炭对多晶硅回收H_2中的HCl、Si HCl_3和Si Cl_4的吸附等温曲线,并用Freundlich方程进行了拟合。在此基础上运用ASPEN Adsorption软件对各组份的穿透曲线进行模拟和分析。根据HCl穿透曲线的形态和穿透点位置,可以确定活性炭吸附塔的装填量和吸附时间,模拟结果与实际运行情况较为吻合。

Under the mechanism of gas-adsorption, the Freundlich isotherms of HCl, Si HCl3 and Si Cl4 were obtained by experiments carried out on coconut activated carbons. Furthermore, the breakthrough curves of HCl, Si HCl3 and Si Cl4 were simulated by ASPEN Adsorption. HCl was identified as the key component of adsorbate. Based on the shape of the breakthrough curve and the break-point location of the HCl, the weight of the activated carbons loaded in the adsorption bed can be calculated and the adsorption time can be estimated. Comparing with the actual production process, the simulation result was satisfactory.