超声振动微铣削加工表面质量试验研究

Experiment Research on Machining Surface Quality in Ultrasonic Vibration Micro-milling of Hard and Brittle Materials

根据超声振动加工硬脆材料的特性,结合已完善的微铣削加工平台,采用超声振动辅助微铣削的方法加工石英玻璃,并与普通微铣削进行了对比。通过单因素分析法来研究加工表面质量随各铣削参数的变化规律。结果表明:超声振动对硬脆材料的微铣削加工是有利的,且以表面质量较好、加工效率较高为目标,得出了最佳铣削参数组合。

According to the features of ultrasonic vibration micro-milling of hard and brittle materials ,we adopted the method of ultrasonic vibration aided micro-milling processing quartz glass which is combined with the perfect platform, and compared with the common micro-milling. We compared effects on the machining surface quality of the different values of parameters with the single factor analysis method. The results showed that the ultrasonic vibration is good for micro-milling of hard and brittle materials, and obtained a best parameter combination.