摘要
制作了PNZT薄膜驱动的压电微悬臂梁,将压电微悬臂梁的模型简化为压电层-结构层双层微悬臂梁模型,并使用理论计算和有限元仿真软件分析了双层微悬臂梁模型的基频,最后用激光多普勒测振仪对微悬臂梁结构进行了测试。结果表明,仿真、理论和实验测试结果在一定程度上符合得很好,为以后此类压电微悬臂梁的制作和基频的计算提供了参考。
This paper manufactured piezoelectric microcantilevers enhanced by PNZT films, and the piezoelectric microcantilever model was simplified to a piezoelectric layer-structure double microcantilever model.Then, theoretical calculation and the finite element simulation analysis were used to research fundamental frequency of these microcantilevers.Finally laser Doppler vibration was used to test these microcantilevers. These results showed that the simulation, the theory and the test results were in good agreement partly, so the works presented in this paper provides reference to manufacturing piezoelectric microcantilevers and calculating their fundamental frequency.
出处
《仪表技术与传感器》
CSCD
北大核心
2017年第6期22-25,共4页
Instrument Technique and Sensor
基金
国家自然科学基金资助项目(51305005)
关键词
压电微悬臂梁
基频
激光多普勒测试
piezoelectric microcantilever
fundamental frequency
laser Doppler vibration
