摘要
主要描述了用SU-8胶制造微流控芯片模具的方法,并在此基础上成功制备微流控芯片。讨论了其制备工艺流程,主要包括有前烘、中烘、光刻、显影等因素对模具的影响,提出了一个可供参考的模具制作工艺流程,并对抗粘层工艺进行了讨论,最终成功制作出模具。研究了用浇铸工艺制作PDMS微流控芯片的方法,利用聚焦的原理,实现粒径12微米左右待检测微球的单通和荧光检测,该芯片同时可以用于其它方面的生物检测。
The manufacture process of SU-8 photo resist mold for micro fluidic chips was described, and microfluidic chip which can realize single passing of micro balloons was successfully made. Processes including former bake, bake, lithography, imaging and other process have great impacts on SU-8 mold. A mold making process for reference was proposed, and anti-adhesive layer process was also discussed. Finally, through these studies on process, a mold was produced and used in fluid successfully, and micro balloon of 12 μm has finish its job of single pass and been detected.
出处
《人工晶体学报》
CSCD
北大核心
2017年第6期1160-1165,共6页
Journal of Synthetic Crystals
基金
国家自然科学基金(11304020)
关键词
SU-8
模具
荧光检测
单通
SU-8
mold
fluorescence detection
single pass
