基于Bouc-Wen类迟滞模型的压电微动台建模

Modeling of piezoelectric micro machine based on Bouc-Wen hysteresis model

针对压电微动台驱动时,由压电陶瓷产生的迟滞现象,提出了一种迟滞模型。基于Bouc-Wen迟滞模型的基本思想,并针对Bouc-Wen迟滞模型进行了优化改进,大大降低了模型参数的辨识难度,缩短了运算时间,保证了模型的较高精度要求。为了验证模型的正确性,运用相关的实验设备对模型进行了实验验证。结果表明:改进后的模型定位误差为0.1866μm,最大相对误差为0.467%,验证了模型具有较高的精度以及该迟滞模型的可行性,为后续压电微动台控制器的设计提供了一种可行方案。

A hysteresis model is proposed,aiming at hysteresis of piezoelectric ceramic. The model is based on the basic idea of Bouc-Wen hysteresis model,and the optimization of Bouc-Wen hysteresis model is carried out. The identification difficulty of model parameters is greatly reduced,and the computation time is reduced. It also ensures the high precision of the model. In order to verify the correctness of the model,the model is validated by experiments. The results show that localization error of the improved model is 0. 186 6 μm,and the maximum relative error is 0. 467 %. The model is proved to has high precision and the feasibility of this model is verified,and a feasible scheme is provided for the design of the controller of the piezoelectric micro machine.