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高精度电容式MEMS加速度计系统设计 被引量：3

Design of a high precision capacitive MEMS accelerometer system
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摘要 在传统Σ-Δ架构基础上,引入了低精度高速模/数转换器(ADC),将前置放大器输出的模拟电压信号转换为数字信号,有利于简化电容式微电子机械系统(MEMS)加速度计系统模拟接口电路设计。在嵌入ADC的MEMS加速度系统中,采用过采样平均数字算法对信号进行估计,有效降低系统对前置放大器噪声性能的需求,利于实现低功耗和高精度的设计目标。仿真结果表明:与未采用过采样平均技术相比,当前置放大器输出等效噪声大于1μV/Hz^(1/2)时,系统的信噪比(SNR)提高了约10 dB。 A low precision,high speed analog digital converter（ ADC） is embedded on the basis of traditionalΣ-Δ architecture,to simplify analog interface circuit design of capacitive MEMS accelerometer system. ADC is used to convert analog voltage signal of analog front end amplifier output to digital signal. Based on capacitive MEMS accelerometer system embedded with anADC,an over sampling average digital algorithm is used to evaluate the signal,which can effectively reduce the system requirement of the noise performance of front end amplifier. This method provides potential to achieve low power consumption and high precision design. Simulation results show that SNR of accelerometer presented is improved about 10 dB than that of system without using over sampling average technique.
作者 李宗伟 杨燕 熊兴崟 丛宁 辛维 韩可都
机构地区 中国科学院地质与地球物理研究所中国科学院油气资源研究重点实验室 中国科学院大学
出处 《传感器与微系统》 CSCD 2017年第6期98-101,104,共5页 Transducer and Microsystem Technologies
关键词 微电子机械系统 Σ-Δ 模/数转换器 数字环路滤波器 过采样平均 MEMS Σ-Δ ADC digital loop filter over sampling average
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置] TN432 [电子电信—微电子学与固体电子学]
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传感器与微系统
2017年 第6期

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