激光光束质量测量系统技术的研究

Research on Laser Beam Quality Measurement System

为适应社会对高质量激光器的需求,提高光束质量的前提是能获得其准确的性能参数。设计了一款基于机械系统、光学系统、电子学系统组成的M^2因子光束质量测量系统。其创新点在于系统的智能化。系统通过步进电机自动控制整个平台使得CCD相机采集到多点的激光切片图像,完成图像的采集后传输给计算机,由软件进行数据处理与算法分析,最终会在上位机中看到激光的光强分布图及处理结果。实验结果表明,系统可以对200~1300nm范围内的激光光束质量进行测量鉴定,进而对提高光束质量提供可靠依据。

In order to meet the needs of the society for high quality laser,the standard of improving beam quality is to obtain the accurate performance parameters. Therefore,a M^2 factor beam quality measurement system based on mechanical system,optical system and electronic system is designed. Its innovation lies in the intelligent system. The stepping motor system through the automatic control of the whole platform makes the CCD camera to collect the laser multi point slice image,image acquisition transmission computer,data processing and analysis algorithm by software,will finally see the light intensity distribution map and the results of laser in the computer. The experimental results show that the system can be used to measure the laser beam quality in the range of 200～1300nm,and provide a reliable basis for improving the beam quality.