利用扫描电镜检测硅化镀膜注射剂玻璃瓶膜层厚度方法的探讨

Thickness Determination of Silicon Coating for Glass Injection Bottles by Scanning Electron Microscopy

目的:采用聚焦离子束(FIB)场发射扫描双束电镜检测硅化镀膜注射剂玻璃瓶的膜层厚度,考察膜层的稳定性和均一性。方法:选择中硼硅玻璃管制硅化镀膜注射剂瓶作为试验样品,通过超声清洗、耐高温、耐热性、耐水性、耐酸性、耐碱性等稳定性试验处理后,利用FIB场发射扫描双束电镜的离子束,对玻璃瓶的硅化膜层进行垂直切割,利用扫描电镜的内置测量模块对切割面的硅化层厚度进行测量。结果:中硼硅玻璃管制硅化镀膜注射剂瓶的硅化膜层厚度稳定性和均匀性较好。结论:FIB场发射扫描双束电镜能够准确地检测玻璃硅化瓶的膜层厚度,并能直接客观地反映出硅化瓶的膜层稳定性和均一性。

Objective： To detect the thickness of silicon coating film for glass injection bottles by focused ion beam （FIB） emission scanning electron microscopy and investigate the stability and uniformity of the film. Methods： The boron silicon coating injection bottles were selected as the experimental samples and treated with such stability experiments as ultrasonic cleaning, high temperature resistance, heat resistance, water resistance, acid resistance and alkali resistance. The samples were vertically cut by the ion beam from an FIB field emission scanning electron microscope, and the thickness of the cutting face was measured by the built-in measuring module of the scanning electron microscope. Results： The thickness of silicon film was stable and uniform. Conclusion： The film thickness of glass bottles can be accurately detected, and the film stability and uniformity can be reflected directly and objectively by using an FIB double beam field emission scanning electron microscope.