高熵合金氮化物薄膜的研究进展

Advances in Nitride Films of High Entropy Alloy

基于多元高熵合金思想制备的高熵合金氮化物薄膜由于多种元素相互混合,易于产生高熵效应、晶格畸变效应和缓慢扩散效应,使得该新型薄膜体系形成简单的非晶结构和纳米晶结构。依赖于成分和制备工艺,多元高熵合金氮化物薄膜表现出简单的固溶体结构和优异的性能,因而在许多领域极具应用潜力。综述了高熵合金氮化物薄膜的发展概况、组织特点、性能特征、制备方法和应用前景,并对高熵合金氮化物薄膜的发展方向进行了展望。

Nitride films of high entropy alloys fabricated based on the idea of multi-principal-element high entropy alloy have been found to possess high entropy effect,lattice distortion effect,and sluggish diffusion effect due to multielemental mixtures. This makes the new film system usually have a simple nanocrystalline or amorphous structures. Depending upon the composition and/or processing route,the nitride films of multi-principal-element high entropy alloy exhibit simple solid solution structure and excellent properties,and they have potential application in many areas. In this article,the development,microstructure,properties,proces-sing route and promising application of nitride films of high entropy alloys are summarized,and its directions of future research are also discussed.