金属掺杂类金刚石薄膜研究进展

Research Progress of Metal Doped Diamond-Like Carbon Films

类金刚石薄膜(DLC)因具有优异的力学性能和摩擦学性能而受到广泛关注,但内应力高、热稳定性差等问题制约了它的应用和发展。将适量的金属掺入DLC薄膜中,由于金属与碳的键合作用不同,掺杂后形成的纳米晶或纳米金属碳化物颗粒具有高的活性,增加了晶界滑移,改善了薄膜结构,进而提高了薄膜的力学性能和摩擦学性能,为薄膜的应用和发展提供了新思路。对目前金属掺杂DLC薄膜的研究进行了综述,提出了未来一段时间内金属掺杂DLC薄膜的发展趋势。

Diamond-like carbon （DLC） films have attracted more and more attention due to their promising mechani- cal and tribological properties. However, there are some problems in DLC films such as high internal stress, low thermal stability, which restrict the further application and development of DLC films. Moderate metal doped in the DLC films can form nanocrystallines or MeC nanoparticles in the matrix, which depend on the bonding mode between metal and carbon. Those particles with high activity increase the grain boundary slip and change the structure of films, which in turn improve the mechanical and tribological performance of DLC films, and thus provide a new idea for the application and develop- ment of the film. Current research progress of the metal doped DLC films is summarized and the development trend of those films in the future is put forward.