AISI 316L不锈钢表面沉积Ti掺杂类金刚石薄膜及其性能

Properties of Ti Doped Diamond-Like Carbon Film on AISI 316L Stainless Steel

为了进一步评价医用材料AISI 316L不锈钢表面沉积掺杂Ti类金刚石薄膜的应用性能,采用离子束辅助沉积技术在AISI 316L不锈钢表面沉积了掺杂Ti类金刚石(DLC-Ti)薄膜。分别利用X射线衍射仪、扫描电子显微镜、摩擦磨损试验机、电化学工作站及纳米压痕仪对DLC-Ti薄膜的晶体结构,表面与截面形貌,摩擦磨损性能,电化学性能,硬度和弹性模量进行了表征。结果表明:DLC-Ti薄膜的摩擦系数超低(0.017~0.029)且未出现磨损,自腐蚀电位和点蚀电位相对于基体向正电位方向移动。DLC-Ti薄膜综合性能较好,在整形外科及刀具等应用方面具有很好的前景。

Ti doped diamond-like carbon （DLC-Ti） film on AISI 316L stainless steel was deposited by ion beam assisted deposition technique.The X-ray diffraction,scanning electron microscopy,friction and wear testing machine,electrochemistry workstation and nano indentation were utilized to characterize the structure,morphology,friction performance,electrochemical behavior and hardness and elastic modulus of film coated and uncoated stainless steel,respectively.Results showed that the friction coefficient of film was super low （0.017-0.029）,and no wear phenomenon was observed.The free corrosion potential and pitting potential of DLC-Ti film shitted positively to those of the substrate.Generally,the DLC-Ti film performed good comprehensive performance,and presented a promising application to orthodontic and cutting tools.