氯硅烷歧化制备硅烷工艺

Preparation of Silane from Disproportionation of Chlorosilane

近年来随着我国时代快速发展与社会经济的繁荣,多晶硅生产领域也获得了空前发展。氯硅烷歧化制备硅烷工艺因为其生产成本偏低、投资小以及实际产生的能耗较少等优点,逐渐受到更多企业的重视和关注。该工艺与其他制备方法相比,在生产过程所获取硅烷的转化率更高,多数能够达到96%左右。硅烷最后甚至能够全部转化成氢气以及高纯硅。因此研究了氯硅烷歧化制备硅烷工艺。

In recent years, with the rapid development of our country and the prosperity of social economy, polysilicon production has also been an unprecedented development, chlorosilane disproportionation of silane process because of its low production costs, small investment and the actual production of less energy Advantages, and gradually by the attention of more enterprises and attention. Compared with other preparation methods, the conversion rate of silane obtained in the production process is higher, and the majority can reach about 96 percent.Silane finally can even be converted into hydrogen （H2） and high purity silicon.Let＇s take a brief look at the details of＂ Chlorosilane Disproportionation Preparation of Silane Processes＂ .