大气压射频等离子体光强测量系统的设计

Design of ARTP Light Intensity Measurement System

基于对大气压等离子体放电射流特性的分析,考虑到实验室对于大气压射频等离子体强度的要求,设计出一套高灵敏度、高精确度的光强测试系统,实时测量等离子体放电强度,找到等离子体放电强度与辉光放电光强的对应关系,为今后的实验及产品开发提供参考和依据。

Based on the characteristic analysis of atmospheric pressure plasma jet,considering the laboratory requirements for atmospheric-pressure RF plasma intensity,a light intensity testing system with high sensitivity and high accuracy is designed,which can be applied to the real time measurement of light intensity.The corresponding relation between the plasma discharge intensity and glow discharge intensity is found out.This study may play an important role in experiment and the development of products in the future.