微圆弧金刚石刀具修磨技术研究

Research on dressing and truing of microarc diamond tool

微圆弧金刚石刀具是超精密加工中的重要应用工具,基于机械研磨法开展微圆弧金刚石刀具修磨技术研究。通过分析微圆弧金刚石刀具制备技术现状和制备难点,设计一种微圆弧金刚石刀具的修磨技术路线。通过修磨实验解决难磨、易磨方向定位,刀尖容易崩刃及精修刀尖圆弧等技术难点,制备刀尖半径R8.2μm的微圆弧金刚石刀具。利用原子力显微镜和高倍光学显微镜进行观测,结果表明:前刀面粗糙度R_a=1.50nm,刀尖轮廓波纹度优于0.1μm,与进口高精度刀具指标相当。将其应用在微结构的超精密切削中,取得良好效果。

The microarc diamond tool is widely applied in ultra-precision machining.Research on micro arc diamond cutter dressing technology is implemented based on mechanical grinding.Through the analysis of the preparation technology of microarc diamond tool and its difficulty,a new method to dress the microarc diamond tool is designed to solve technical nodi such as locating at both hard and easy directions,breakage of blade tips,and precision dressing of tip arc.Experiments show that a microarc diamond tool with tip radius of 8.2μm is prepared,which is investigated using atomic force microscope and high-magnification optical microscope.It is found that the roughness of the rake face was 1.50 nm and the profile waviness of the tip better than 0.1μm,which is slmiliar to imported high-precision tools.Actual application of ultra-precision cutting microstructure reveals that the tool has good machining effect.