MSA在集成电路测试行业中的应用

Application of MSA in Integrated Circuit Test

测量系统分析(简称:MSA)是使用数理统计和图表对测量系统的分辨率和误差进行分析的一种方法,以评估测量系统的分辨率和误差对于被测量的参数来说是否合适,并确定测量系统误差的主要因素。以晶圆级测试数据为例,将MSA运用到集成电路测试行业中,使用MINITAB 16对某多site测试数据进行分析,选用量具R&R研究(交叉)方法,通过测量系统重复性和再现性研究两个J750机台是否存在差异,确定主要误差来源。MSA为验证测量系统的稳定性,不同site间的一致性,为保证集成电路产品质量和可靠性提供了一种有效的数字化手段,很好的保障了产品的良率,降低了企业面对低良率或不稳定测试造成的损失。

Measurement system analysis, briefly called MSA, is a method to analyze the resolution and systematic error in the measurement ＇system words, the resolution and systematic error in the using mathematical statistics and charts, In other measurement system are evaluated for the tested parameters by the method, and the main component in the systematic error is determined as well. The wafer level test data are used as an example, applying MSA to the testing of integrated circuit, using MINITAB16 and Gage R＆R to analyze the data of multi-site test to identify the major sources of error and to confirm whether there are differences between the two J750 machines. An effective mean is provided to verify the stability of the measurement system and ensure the quality and reliabili＇ty. All these will provide a good guarantee of the yield of the products, and reduce the various losses caused by low yield or instability test.