强脉冲离子束材料表面改性研究进展

Studies on surface modification of materials by intense pulsed ion beams

强脉冲离子束材料表面改性技术是正在发展中的新的材料表面改性技术。近四、五年来,我们围绕发展强脉冲离子束材料表面改性技术对其主要机制(强脉冲能量效应)、离子辐照诱发的热力学过程、表面熔坑现象及大面积均匀离子束技术开展了比较全面的基础性研究。研究表明,强脉冲离子束改性除了离子注入的元素掺杂效应外,其更可利用强脉冲能量沉积诱发的热力学效应,有望突破离子射程对改性层厚度的限制,并高效利用离子剂量和能量,成为新一代低成本、高效率、高生产率、实用化的离子束材料改性与合成工艺。本文对于上述研究的主要进展和相关问题进行了总结和评论。

The surface modification of materials induced by intense pulsed ion beam is a new ion beam technology for surface modification of materials. To develop this new technology, we have started a series of basic studies on intense pulsed energy effects, thermoldynamic process and crater phenomena on the metallic surface irradiated by intense pulsed ion beams and construction of planar magnetically insulated diode to get homogenous intense pulsed ion beam with a large beam size. It has been demostrated that, for intense pulsed ion beams, excepting ion doping effects, the thermoldynamic effects induced by the energy deposition are more promising as a powerful tool for the surface modification of materials, since there could be the 搒uper-range effects?and the high availability of ion dose and energy. In this paper, the progress of fundamental studies on above items in our lab is reviewed.