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飞秒激光加工全光纤马赫泽德尔干涉仪的传感特性研究 被引量:1

Fiber In-line Mach-Zehnder Interferometer Fabricated by Femtosecond Laser Micromachining and Its Sensing Properties Research
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摘要 通过化学腐蚀辅助飞秒激光改性的方法,在普通单模光纤(SMF-28)上加工了一种V槽型全光纤马赫泽德尔干涉仪(MZI)传感器件。该器件具有良好的光谱特性,条纹可见度达到6dB;此外,还具有优异的折射率和温度传感特性。当外界折射率在1.33~1.45变化时,线性拟合得到其灵敏度高达8 225nm/RIU,线性度高达0.997;在水中,当温度由25℃变化到60℃时,其温度灵敏度高达1.805nm/℃。研究表明,该传感器结构紧凑,易于加工制造,并且具有极高的折射率灵敏度,特别适用于溶液折射率检测。 A fiber in-line Mach-Zehnder interferometer(MZI)with V-shape micro-cavity fabricated by femtosecond laser micromachining and chemical etching method in SMF-28 is proposed.The MZI has showngood spectral characteristics and the fringe visibility of 6dB is observed.Moreover,it has exhibited excellent refractive index and temperature sensing properties.An extremely high refractive index sensitivity of 8 225nm/RIU with the linearity of 0.997 in the range of 1.33~1.45 is obtained.At the same time,its temperature sensitivity is as high as 1.805nm/℃in water in the range from 25 ℃ to 60 ℃.It has demonstrated that the MZI sensor is especially suitable for the refractive index measurement because of its compact size,easy manufacturing and extra-high refractive index sensitivity.
作者 董欣然 王伟莹 胡友旺 Dong Xinran Wang Weiying Hu Youwang(State Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha, Hunan 410083, China)
出处 《应用激光》 CSCD 北大核心 2017年第3期420-423,共4页 Applied Laser
基金 国家自然科学基金资助项目(项目编号:51475481 51475482 51335011) 教育部"新世纪优秀人才支持计划"资助项目(项目编号:NCET-12-0548) 中南大学中央高校基本科研业务费专项资助项目
关键词 飞秒激光 化学腐蚀 马赫泽德尔干涉仪(MZI) 折射率传感 温度传感 femtosecond laser chemical etching Mach-Zehnder interferometer(MZI) refractive index sensing temperature sensing
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