平面光学元件研磨抛光磨粒运动轨迹曲率研究

Study on the curvature of the particle motion trajectory in ultra-precision lapping and polishing

为提高研磨抛光加工表面质量,利用Matlab软件编制程序对不同参数下轨迹曲线曲率进行计算分析。结果表明,转速比对磨粒运动轨迹曲线曲率影响很大;相同转速比下的曲线曲率呈现周期性变化,曲率变化幅值很小;磨粒径向距离越大,曲率变化越剧烈,工件边缘处容易产生曲率突变;考虑到对磨粒径向距离的影响,偏心距不宜太大或太小。同时,磨粒初始角度对磨粒轨迹曲线曲率形状没有影响。该研究可为研磨抛光设备的设计提供理论指导。

The curve curvature is simulated by Matlab software programs under different parameters in order to improve the surface quality of lapping and polishing.The results indicate that different types of rotating speed have great influence on the curvature of grinding particle motion curve;Under the same rotating speed ratio,the curve curvature shows not only the periodic variation but also the amplitude of the variation of the curvature is very small.The bigger radial distance of the abrasive grains,the severe of curvature change,the plane optical elements edge prone to abrupt change of curvature.Considering the effect of the radial distance,the eccentricity should not be too large or too small.At the same time,the initial angle of different abrasive grains has no influence on the curvature shape of the particle trajectory.The theoretical guidance is provided for the design of the grinding and polishing equipment.