摘要
镀膜器反应面平整度为在线镀膜的重要工艺参数。介绍了在线CVD镀膜系统安装调试及生产过程中,如何使用更加科学的方法来精确检测调整镀膜器反应面的平整度。
The flatness of the coating beams reaction surface is acknowledged as one of the most important technological parameters of on-line coating. Shows how to accurately make the flatness of the coating beams reaction surface measured and adjusted during the installation and commissioning of on-line CVD coating system, particularly in the process of the coating production.
出处
《玻璃》
2017年第7期56-58,共3页
Glass
关键词
在线CVD镀膜器
反应面
平整度
间隙
膜层均匀性
on-line CVD coating beam, reaction surface, flatness, gap, layer uniformity
