摘要
综述了PZT薄膜的制备方法 ,从电极、微观结构和化学成分、生长方向、多层膜结构以及机械应力对性能的影响五个方面介绍了PZT薄膜的研究进展 .
The fabrications of PZT thin films are discussed. The research progress in PZT thin films are introduced from five aspects: electrodes, microstructure and stoichiometry, growth orientation, multilayers structure and effect of external stress on properties.The main problems and directions of development in PZT thin films are presented
出处
《材料与冶金学报》
CAS
2002年第2期83-86,135,共5页
Journal of Materials and Metallurgy
