MEMS冷气推力器的制作和热性能研究

Fabrication and Thermal Property Research of MEMS-Based Cold Gas Thruster

为了研究MEMS(Micro Electro Mechanical Systems)冷气推力器的热性能,介绍了一种MEMS冷气推力器的设计和制作,该推力器体积小(40mm×20mm×1mm),重量轻(1g),功耗低。对推力器加热丝不同电压和环境下进行了热仿真,对组装到电路板上的推力器模块进行了热测试。结果表明:常温常压下,8V的驱动电压,经过230s后,推力器加热丝的温度可达到80℃以上,与仿真结果趋势相同,可预见真空中,8V电压下可满足推进剂对加热腔温度的需求。

In order to study thermal property of cold gas thruster based on MEMS（Micro Electro Mechanical Systems）,the design and fabrication of a MEMS-based cold thruster are presented. The dimension and mass of this fabricated thruster is 40mm×20mm×1mm and 1g respectively,which would be integrated into micro cold propulsion system. The thermal property of thruster heater which would be used to increase specific impulse of propulsion system was simulated and the test to verify the simulation was implemented. The results show that the heater could warm the thruster chamber up to 80℃ through 230 s heating at ambient environment and 8V drive,which agree well with simulation results. Based on results in ambient environment,better thermal property of thruster heater can be expected in vacuum environment.