能量过滤磁控溅射制备TiO_2薄膜的光催化性能研究

Photocatalytic Properties of TiO_2 Thin Films Deposited by Energy Filtering Magnetron Sputtering

利用能量过滤磁控溅射(EFMS)技术制备了TiO_2薄膜,并利用X射线衍射、扫描电镜和紫外-可见分光光度计分析了薄膜的结构、形貌和对RhB溶液的光催化效率。研究表明:与直流磁控溅射技术相比,EFMS技术制备的TiO_2薄膜的晶粒尺寸更小,表面更加平整,紫外光照射2 h后,其光催化效率提高了1.5倍。

The TiO_2 thin films were deposited by DC and energy filtering magnetron sputtering（ EFMS） on glass substrate,respectively. The impact of the mesh-size of the energy filtering grid on the microstructures and photocatalytic properties of the TiO_2 films was investigated with X-ray diffraction,scanning electron microscopy and UV-spectroscopy. The results show that depending on the mesh-size,the energy filtering significantly improved the quality of DC magnetron sputtered（ DMS） TiO_2 coatings. The energy filtering markedly reduced the grain-size,decreased the surface roughness,improved the uniformity and increased the photocatalytic efficiency of the DC magnetron sputtered TiO_2 coatings,because energy filtering effectively prevents the high energy secondary electrons from damaging the substrate and film growth. After UV irradiation for 2 h in degrading rhodamine-B（ Rh B）solution,the TiO_2 coatings,grown by EFMS,displayed the photocatalytic efficiency 1. 5 times higher than that synthesized by DMS.