并联自解耦二自由度微位移平台的研制与测量

Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage

针对传统串联式微位移机构具有的结构不紧凑和刚度较低等问题,本文设计了一种结构紧凑、具有高分辨率和高刚度的并联式自解耦二自由度微位移平台。该平台采用了4个对称布置的嵌套式平行导向机构,使得平台具有刚度对称和自解耦等特点。本文还对嵌套式平行导向机构的工作原理进行了分析。通过有限元方法仿真分析了微位移平台在不同受力状态下的变形情况,并对其进行了模态分析。经实验测量,证实了该平台具有自解耦功能,并得出了微位移平台的实际行程,且其输出位移也被证实具有较为良好的线性度。

Due to traditional serial-type micro-motion stage has disadvantages of incompact structure and low stiffness, a parallel-type self-decoupling 2-dimension micro-motion stage was designed with the advantage of compact structure, high-resolution and high stiffness. Four symmetrical nested parallel guide mechanisms were adopted in this platform to confer it has the features of symmetrical stiffness and self-decoupling. Operation principle of nested parallel guide mechanism was analyzed in this thesis. Simulation of deformation situation of micro-displacement platform on condition of different stresses was conducted via finite element method, and modal analysis was conducted on it. It is verified that this platform has the function of self decoupling, and the actual travel range of micro-displacement platform obtained through experimental measuring, and it is also verified that its output displacement has good linearity.