20—80K低温压力传感器校准系统的研制

Design of calibration system for 20-80 K low temperature pressure sensor

针对低温压力传感器的精确测量,设计并搭建了一套20-80 K低温压力传感器校准系统,介绍了系统中恒温试验腔的原理、结构及连接方式,验证了恒温试验腔内温度场的均匀分布。恒温试验腔完全浸没在液氢中,通过温度控制系统调节腔内电加热丝功率,来实现对测试环境温度的控制。试验结果表明,该系统结构紧凑,安全可靠性高,性能稳定,测试温区内变温有良好的温度梯度,温控精度在±0.2 K以内,可通过压力标准源对安装在恒温试验腔内的低温压力传感器进行精确校准。

A calibration system for 20 - 80 K low temperature pressure sensor was designed for the pre- cise measurement of low temperature pressure sensor. The principle, structure and connection method of the cryostat was introduced,and the uniformity of temperature field in the cryostat was proved. In this system cryostat was completely submerged in the liquid hydrogen. The test temperature was controlled by varying the power of the electric heater strip. The results show that this system has compact structure, high safety and reliability, stable performance. The system has a good temperature gradient and a low temperature accu- racy of ± 0.2 K when varying the power,which can calibrate the low temperature pressure sensor in the cry- ostat accurately by pressure standard source.