等离子体增强磁控溅射制备Ti(Cr)SiC(O)N涂层的结构和力学性能研究（英文）

Microstructure and Mechanical Properties of Ti(Cr)SiC(O)N Coatings Deposited by Plasma Enhanced Magnetron Sputtering

采用等离子体增强磁控溅射(PEMS)方法分别在硬质合金和硅片上制备了TiSiCN,TiSiCON,TiCrSiCN,TiCrSiCON,CrSiCN和CrSiCON涂层。采用XRD、SEM、EDS、显微硬度计及销盘式摩擦磨损试验机对含氧涂层和不含氧涂层的微观结构、成分和力学性能进行了研究。结果表明,TiSiCON,TiCrSiCON和CrSiCON含氧涂层为TiN型(或CrN型)面心立方(fcc)结构,但是TiSiCON,TiCrSiCON和CrSiCON涂层中氧的存在会导致产生疏松结构,与不含氧涂层TiSiCN,TiCrSiCN和CrSiCN相比具有更多的缺陷;氧的加入会导致Ti(Cr)SiCN涂层硬度和弹性的下降;TiCrSiCON和CrSiCON2种含氧涂层相对于不含氧涂层TiCrSiCN和CrSiCN具有更低的摩擦系数和磨损率;然而,TiSiCON相对于TiSiCN却表现出更高的摩擦系数和磨损率。

TiSiCN, TiSiCON, TiCrSiCN, TiCrSiCON, CrSiCN and CrSiCON coatings have been deposited on WC-Co substrates and Si wafers using plasma enhanced magnetron sputtering（PEMS） technique. The microstructure, composition and mechanical properties of the non-oxygen coatings and oxygen-containing coatings were studied by XRD, SEM, EDS and load-depth-sensing indentation. The tribological behavior of the coatings against Al2O3 balls was conducted by pin-on-disc tests. The results show that TiSiCON, TiCrSiCON and CrSiCON coatings exhibit the face center cubic（fcc） TiN-type（or CrN-type） structure. The existence of oxygen will induce loose structure and more defects for TiSiCON, TiCrSiCON and CrSiCON coatings compared with TiSiCN, TiCrSiCN and CrSiCN, respectively. The addition of oxygen element would lead to the decrease of the hardness（H） and elasticity of Ti（Cr）Si CN coatings. TiCrSiCON and CrSiCON coatings with oxygen element have lower friction coefficients and wear rate compared with TiCrSiCN and CrSiCN coatings without oxygen, respectively. The TiSiCON with higher friction coefficient and wear rate shows poor abrasive wear resistance than TiSiCN.