SOI基级联双微环滤波器研究

Research of SOI Series-coupled Double-ring Resonator Filters

研究了基于绝缘衬底上的硅(SOI)材料的微环谐振器,实现了光滤波器的功能。采用电子束直写和干法刻蚀等工艺制作出SOI基微环谐振器,微环半径为74μm。测试结果表明,器件的自由频谱宽度(FSR)为1.238nm,1 550nm波长附近的抑制比大于10dB。通过对微环谐振器进行热调谐,在0~4V电压范围内实现了大于一个FSR的可调谐滤波特性。

The microring resonator based on silicon-on-insulator was researched and used to achieve optical filter.The SOI microring resonator was fabricated by E-beam lithography and dry etch process.The radius of the microring resonator is 74μm.The free spectrum range（FSR）of the device is measured to be 1.238 nm.And the rejection ratio of the series-coupled double-ring resonator at wavelength of 1 550 nm is greater than 10 dB.Finally,the device can be thermally tuned by applying power to the heaters.When the heating voltage is 4V,the filtering profile is tuned for over one FSR.