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非制冷红外焦平面探测器热敏薄膜技术研究进展 被引量:3

Development of sensitive film technology for uncooled infrared focal plane array detector
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摘要 近年来红外探测技术在军事和民用领域得到了迅速的发展,非制冷红外探测器以其低成本、小型化、非制冷等优势在红外探测系统发展中占据着重要的地位。本文总结了国内外非制冷红外探测器的发展现状,分析了两种主要的非制冷红外探测器技术路线的特点及差异,并给出了这两种技术路线后续发展趋势。 In recent years, uncooled infrared detecting technology has obtained a rapid development in both military and civilization fields. As uncooled infrared detector has the characteristics of low price and small size, it plays an im-portant role in the development of infrared detecting system. The development status about domestic and foreign un-cooled infrared detector was summarized, and the feature and difference of two main types of uncooled infrared detector (VOj. and α - Si) were compared and analyzed. Finally development trend of this technology is pointed out.
作者 王成刚 宋广
出处 《激光与红外》 CAS CSCD 北大核心 2017年第8期927-929,共3页 Laser & Infrared
关键词 非制冷红外探测器 氧化钒 非晶硅 uncooled infrared detector VOj. α- Si
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