静电悬浮天基超静平台电容式检驱一体化电路设计方法

Design method for capacitive detection and driving integrated circuit of electrostatic suspension space-based ultra-quiet platform

电容式检驱一体化电路是静电悬浮式天基超静平台的关键技术之一,为实现对大型载荷平台的宽频微振动控制,要求电容式检驱一体化电路具有兼容高频高压反馈驱动的特性。以星载静电悬浮加速度计中的电容式检驱一体化电路为基础,详细推导了检测与驱动对电路输出的传递特性,并基于传递特性的理论分析分别从频域和时域提出两种解耦降噪的设计方法,有效抑制了驱动信号的线性/非线性耦合干扰。实验结果表明,所提方法可使主频为1 kHz、幅值为1 kV的驱动造成的耦合影响低于76.3μV。

The capacitive Detection Drive integrated circuit（CDDIC） is one of the key technologies of the electrostatic suspension space-based ultra-quiet platform. In order to control the broadband micro vibration of large-load platform, the CDDIC should have the compatibility between the high-frequency and the high-voltage feedbackdrivings. Based on the CDDIC in spaceborne electrostatic suspension accelerometer, the transfer characteristics of detecting and driving to the circuit output are derived. Based on the theory analysis of the transfer characteristics, two kinds of decoupling and denoising design methods are put forward in terms of the frequency domain and time domain respectively, which can effectively inhibit the linear/nonlinear coupling interference of the driving signals. Experimental results show that, by the proposed methods, the coupling effect can be reduced to 〈76.3μV for the driving voltage with 1 kHz basic frequency and 1 kV amplitude.