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TiAlSiN纳米复合涂层的改性研究现状及发展 被引量:7

Modification Research Status and Development of TiAlSiN Nano-composite Coatings
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摘要 随着切削技术向高速、高效、高精、绿色、智能方向发展,切削加工对刀具及涂层性能提出了更高的要求,以TiAlSiN涂层为代表的四元硬质涂层发展迅速。综述了单层TiAlSiN纳米复合涂层的制备工艺、结构与性能特点,根据TiAlSiN单层涂层存在低韧性和低结合强度的问题,提出了对TiAlSiN涂层改性研究的必要性。综述了结构改性、成分改性以及二者相结合改性TiAlSiN涂层的制备工艺、结构与性能特点,指出了纳米多层结构的TiAlSiN涂层中存在的横向层间界面对原子的扩散具有良好的阻碍作用,涂层的抗氧化性由此被提高,涂层硬度等力学性能受多层结构的调制层成分、调制周期等因素影响而被提高或降低。介绍了C、Cu、Cr、V等合金化元素在TiAlSiN涂层中的作用效果,C元素在涂层中具有减摩作用,Cu元素的主要作用是增强涂层与基体的结合,Cu、Cr、V元素在涂层中均使涂层硬度不同程度降低,提出了最大限度发挥添加元素与层间界面结构的协同作用来获取最佳性能的纳米多层结构TiAlSiN基多元涂层是今后研究的重要方向之一。此外,还提出了通过基体前处理和涂层后处理增强TiAlSiN涂层韧性和层基结合强度的发展方向。 As curing technology develops in high-speed, high efficiency, high precision, green and intelligent direction, machining makes higher demands on performance of curing tools and coating. Quaternary hard coating represented by TiAISiN coating is developing rapidly. In view of low toughness and low bonding strength of TiAISiN single-layered coating, necessity of performance modification of TiAlSiN coating was put forward. Characteristics of preparation technology, structure and prop- erties of TiAISiN nano composite coating modified in structure, component and both were reviewed. Transverse interlayer in- terface in the TiAISiN coating on nano-multilayer structure played an important role in preventing atoms diffusion, and thus im- proving oxidation resistance of the coating. Mechanical properties of the coating including hardness were affected by modula-tion layer composition, modulation cycle and other factors concerning the multi-layer structure. The effects of alloying elements such as C, Cu, Cr and V on TiAlSiN coating were introduced. C element exhibited antifriction effect in the coating. The main role of Cu element was to enhance bonding between coating and substrate. Cu, Cr and V elements decreased hardness of the coating to varying degrees. It was proposed as one of the important directions in the future to obtain optimum TiAlSiN-based multi-element coating with nano-multilayer structure by maximizing synergistic effect of adding elements and interlayer inter- face structure. In addition, the development direction of strengthening toughness and coating-substrate bonding strength of TiAISiN coating based upon substrate pre-treatment and coating post-treatment of deposited was also proposed.
出处 《表面技术》 EI CAS CSCD 北大核心 2017年第8期33-42,共10页 Surface Technology
基金 国家科技重大专项(2015ZX04005004)~~
关键词 TiAlSiN涂层 改性 纳米多层结构 层间界面 合金化元素 硬度 抗氧化性能 TiAISiN coating modification nano-multilayer structure interlayer interface alloying element hardness oxi- dation resistance
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