激光微加工的抛光参数数学建模分析

Mathematical modeling analysis on surface polishing parameters of laser micro processing

当前抛光参数数学建模分析方法精度低,建立新激光微加工的抛光参数数学模型,通过数学模型对沟壑的形成原理进行数学建模,获取不同抛光工艺参数对表面激光微加工质量影响的规律,为获取最佳抛光参数组合提供理论依据。选用157 nm激光对表面进行抛光实验,通过最小二乘法求出不同轮廓中线的所有系数,获取轮廓中线的方程,将采样点与轮廓中线绝对值的算数平均值作为粗糙度值,建立粗糙度数学模型。通过激光光斑面积对作用于表面的激光能量密度进行描述,建立激光光斑面积数学模型。实验结果表明,所提模型精度很高。

Current mathematical modeling analysis of polishing parameters has low precision. To this end,a new mathematical modeling based on ravine formation principles was put forward to obtain the regulation of the surface laser micro processing influenced by polishing parameters,which provides theoretical supports for the optimal polishing parameter combination. The 157 nm laser was used in the hard brittle materials surface polishing experiments. All the parameters of different contour lines are calculated by the least squares method to obtain the formula of the contour. Built the roughness mathematical model by the arithmetic average value in the absolute value of the sample points and contour middle line. Through the description of the laser energy density on the surface by the laser spot,buuild the mathematical model of laser spots area. The experimental results show that this method has high precision.