钛酸镧铅薄膜的介电、铁电性能研究

Investigation on properties of Pb_(1-x) La_x TiO_3 thin films fabricated by sol-gel method

采用溶胶 凝胶法在Si衬底上制备了钛酸镧铅薄膜。通过对膜进行XRD、SEM、介电和铁电性能测试 ,研究了退火条件和掺镧量对薄膜性能的影响 ,结果发现在 60 0℃下退火 1h的PLT薄膜呈现钙钛矿结构 ;常温下 ,薄膜的矫顽场和剩余极化强度都随着掺镧量的增加而降低 。

The Pb 1- x La x TiO 3 (PLT) thin films were fabricated by sol gel spin on process onto Si substrates. Effect of La doapant on dielectric and ferroelectric properties have been investigated. From the analysis, we observed the coercive field and remnant polarization decreased with increasing La concentration; and the dielectric constant and the loss tangent increased according to the increase of La concentration. The film annealed at 600℃ for 1h showed perovskite phase, and had the typical hysteresis loops.