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高精度测角系统的检定与补偿方法 被引量:2

Checking and Compensation Method of High-Accuracy Angle-Measuring System
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摘要 在对高精度的测角系统进行检定与补偿时,通过单组角位置误差的检定与补偿往往达不到较好的效果,利用全组合常角的方法能准确的分离棱体偏差与角位置误差,更精准的进行补偿。首先利用棱体-自准直仪的检定与补偿方法,采用部分组合的方法分离了角位置误差与棱体偏差,减小了角位置误差测试的随机误差。通过8序列组合测试分离的角位置误差进行谐波分析后补偿,最后进行全组合法检定,使测角系统的角位置误差的峰-峰值从0.40″下降到0.22″,证明了本方法能有效提高角位置误差的检定精度和效率。 The effect of checking and compensation on high-accuracy angle-measuring system is usually limited by using sin-gle series of measurement data to compensate for the angular position error, but the method of complete combination can sepa-rate polygon errors from angular position errors and compensate for the angular position errors more accurately. At first, basedon the checking and compensation method of polygon-autocollimator system, the parts of complete combination are used toseparate the angular position errors from polygon errors, and the random errors of angular position error measurement are de-creased. Then according to the 8 series of combination test, the harmonic errors of angular position error are calculated andused to compensate for the angle-measuring system. At last, by using the complete combination method to check the angularposition error of angle-measuring system, the peak-to-peak value of angular position error is decreased from 0. 40″ to 0. 22″after compensation. The results show that this method could not only increase the accuracy of angular position, but also im-prove the compensation efficiency.
出处 《机械研究与应用》 2017年第4期100-104,共5页 Mechanical Research & Application
基金 国家重大科学仪器设备开发专项:高精密角位置测量技术(编号:2013YQ310737)
关键词 全组合 部分组合 角位置误差 误差补偿 谐波误差 complete combinatorial comparison incomplete combinatorial comparison angular position error error compen-sation harmonic error
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