摘要
本文介绍用直流－射频平面磁控溅射法制备软ｘ射线多层膜的初步实验结果。在一定工艺条件下，采用计算机定时控制膜厚的方法，严格按照设计周期制备了多层膜样品，并给出了Ｘ射线衍射仪小角衍射的检测结果。
The preliminary experiment of fabricating soft X-ray multilayer by DC-RF planar mag-netron sputtering is described. Under appropriate working conditions,multilayers can be au-tomatically deposited according to designed period (thickness)using computer controlledtiming method. The results of X-ray small angle diffraction show that the film thickness ac-curacv is about 0.1nm.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第1期16-20,共5页
Optics and Precision Engineering
基金
国家自然科学基金及国家高技术863-410-3专题的资助
