原子力显微镜（AFM）力传感器及其固有频率的测试

Atomic Force Microscope Force sensors and Its Resonant Frequency Testing

由悬臂梁与探针集成件（Ｃａｎｔｉｌｅｖｅｒｓｔｙｌｕｓ）组成的力传感器是原子力显微镜的一个关键部件，固有频率（ｒｅｓｏｎａｎｔｆｒｅｑｕｅｎｃｙ）是悬臂梁与探针集成件的一个重要技术指标，本文介绍了对力传感器的要求、力传感器的设计、检测力传感器的方法，着重介绍了一种采用光学象散原理组成的传感器的固有频率测试系统与方法。

In Atomic Force Microscope(AFM),the force sensor,canilever with integrated tip,id acrucial component ,and its resonant frequency is a main technical parameter.In this paper,the specification,design and testing of the force sensor are presentcd. A method based on opticastigmation principles to test the resonant frequency of the force sensors is described in detail