集成硅微悬臂梁融合式传感器制造技术

Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor

简要地描述了以各种微结构的硅悬臂梁作为敏感元件构成的不同用途的新型融合式传感器及其列阵；介绍了硅微悬臂梁融合式传感器的设计和制造工艺；对笔者正在研究的硅微悬臂梁与光纤组合式列阵感器作了初步的报道。研究结果表明这是一种很有前途的技术。

This paper briefly describes the novel hybrid sensors and sensor arrays which use micro-machining silicon cantiliver as key element. The design and productive process are presentedalso. A hybrid optical fiber and micro-machining silicon cantiliver sensor which is been researching is reported. The studying results showed that it is a helpfull technique.