摘要
本文在简要地分析了傅立叶变换轮廓法(FTP)和改进型傅立叶变换轮廓法(IFTP)测量三维物体形状轮廓的可测陡峭度限制后,提出了一种可测量大陡峭度物体的傅立叶变换轮廓法(MFTP),给出了详细的测量方法和理论分析。利用FTP自身的特点,消除了IFTP引入的人为误差,提高了FTP的能测陡峭度。
Having discribed the measurable slope of Fourier transform profilometry(FTP)and improved FTP(IFTP),a modified FTP(MFTP)for the measurement of 3-D steep shapes is proposed in this paer.The detail measuring method and theory analysis ars also given. The artificial error introduced in IFTP was eliminated by utilizing the merits of FTP.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第2期88-93,共6页
Optics and Precision Engineering
基金
国家自然科学基金