摘要
对ＰＳＤ位敏探测器的结构、原理、特性加以分析和概述；着重论述了ＰＳＤ在光学三角测量中的具体应用；详细分析了造成系统误差的根本原因。
The architecture,principle and characters of position sensitive detector (PSD) are analized and stated. The application of PSD in optical triangulation is described emphatically. Thesystem errors are also analysed.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第4期116-120,共5页
Optics and Precision Engineering
关键词
位敏探测器
光学三角测量
非线性
Position sensitive detector,Optical triangulation,Nonlinear
