基于CNTs/PDMS介电层的柔性压力传感特性研究

The Characteristics Study of the Flexible Pressure Sensor Based on CNTs/PDMS Dielectric Layer

提出一种基于MEMS工艺的柔性压力传感器制备方法。采用MEMS工艺制备柔性压力传感器模板,结合纳米压印技术、射频磁控溅射技术和PDMS软光刻工艺在PDMS柔性基底上制备了具有"V"型阵列微结构的Ag薄膜平行板电极,基于碳纳米管(CNTs)/PDMS聚合物的压电容特性,制备出电容式柔性压力传感器。针对不同尺寸的压力传感器进行对比测试,本文制作的压力传感器的灵敏度能够达到3.98%k Pa-1,具有良好的重复性,在智能穿戴和电子皮肤等方面有着广阔的应用前景。

A new method for MEMS technology of flexible pressure sensor is reported in this paper. The flexible pressure sensor mold are obtained by MEMS technology. The PDMS with＂ V＂ type Ag film parallel plate electrode was then made combining nano-imprinting technology, RF magnetron sputtering technique and PDMS mold. On the basis of the piezocapacitance effect of the CNTs/PDMSpolymersfilm, the capacitive pressure sensor was obtained. According to comparison test to the different size of pressure sensor, the developed sensor exhibits a maximum sensi- tivity of 3.98% kPa-I to capacitance ,great durability over 300 cycles. This technique cannot only realize batch prep- aration of wafer level flexible pressure sensor, but have a broad application prospect in the flexible pressure monito- ring and electronic skin.