应变式压电光学偏转器的集成设计及性能测试

Integrated Design and Performance Test for Strain Type Piezoelectric Optical Deflector

提出了一种应变反馈式压电驱动光学偏转器。首先介绍压电光学偏转器的机械结构及内部组成原理,光学偏转器内部集成两个应变反馈式压电驱动器,来实现对镜面的驱动及其角位移测量。然后自准直仪用于校准偏转器,获得的偏转精度为0.05′,并进行一系列开闭环实验以验证定位和跟踪性能。实验结果表明:在开环模式下,30min的定位时间内出现12.60%的蠕变,对变幅值三角波的偏转跟踪误差占偏转量程的13.70%;在闭环模式下,蠕变基本得到消除,对变幅值三角波的偏转跟踪误差占偏转量程的4.31%。因此所设计的压电光学偏转器结构合理,性能稳定,具有较好的工程应用价值。

A kind of strain feedback type piezoelectric optical deflector is presented. The mechanical structure and internal composition principle are firstly introduced for the optical deflector. Two strain feedback type piezoelectric actuators are integrated within the optical deflector, which is used to actuate the mirror and measure its angle displacement. An autocollimator is used to calibrate the deflector, and the obtained deflection accuracy is 0.05＇. And then a series of tests are conducted to validate the positioning and tracking performances for both open and closed loop operations. Experimental results show that, the value of creep reaches 12.60% within 30 min and the tracking error for the varied-amplitude triangular-wave reaches 13.70% of the full scale in open loop mode. In closed loop mode, the creep effect is basically eliminated and the tracking error reaches 4.31% of the full scale. The designed piezoelectric optical deflector has good engineering application value for its reasonable structure and stable performance.