摘要
针对太赫兹波段高通滤波器,介绍了利用光刻工艺在镀有铝层的聚对苯二甲酸乙二醇酯薄膜上进行亚波长结构样品的实验室制备过程,主要研究了亚波长矩形金属孔阵列结构对太赫兹波透射特性的影响,并利用仿真软件对这种结构的高通滤波特性进行了理论分析。对矩形孔结构中孔的大小和金属线宽对高通滤波效果的影响做了数值分析,并建立了相应的数学模型。
For high pass filter in terahertz frequency range, a laboratory preparation process of subwavelength structure sample on polyethylene terephthalate film coated with aluminum layer using photolithography process is described. The influence of subwavelength rectangular metal hole array structure on the transmission properties of terahertz wave is mainly studied, and the high-pass filter characteristics of this structure are analyzed theoretically by using simulation software. The influence of hole size and metal line width of the rectangular hole structure on the high-pass filtering effect is numerically analyzed, and the corresponding mathematical model is established.
出处
《激光与光电子学进展》
CSCD
北大核心
2017年第8期277-282,共6页
Laser & Optoelectronics Progress
基金
国家自然科学基金(61575130
61575131
50971094)
北京市自然科学基金-北京市教育委员会科技计划重点项目(KZ201310028032)
关键词
光学器件
太赫兹
高通滤波器
矩形孔
金属结构
optical devices
terahertz
high pass filter
rectangular hole
metallic structure
